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Nanotechnology platform

The Nanotechnology Platform is an accessible and versatile research facility featuring 150 m2 of class 10.000 cleanroom space and laboratories offering state-of-the-art equipment for the fabrication and characterization of micro- and nanodevices and structures.

Our aim is to facilitate advanced research by providing services in the fields of nanoscience and nanotechnology for all academic and industrial researchers. Some of the many areas of application include: nanobioengineering, BioMEMS, materials science, tissue engineering, optic and biomaterials.

The IBEC’s Nanotechnology Platform offers scientific and technological support that includes the design, development and analysis devices, materials and processes, so that academic researchers and companies alike may use the platform to develop their innovative ideas.


Available Equipment:

  • Time-of-the-Flight Ion Mass Spectroscopy (ToF-SIMS)
  • Ultra-High Resolution Field Emission Scanning Electron Microscopy (SEM)
  • E-beam Lithography (EBL)
  • Nanoimprint Lithography (NIL)
  • Hot-Embossing Lithography (HEL)
  • UV-Photolithography Mask-aligner
  • Direct Write Laser Lithography
  • Thermal and E-beam metal evaporator
  • Reactive Ion Etching (RIE)
  • Inteferometer
  • Profilometer
  • Chemical Bath
  • Spinner
  • Plasma Cleaner
  • Optical microscope


Currently we offer the following services for internal and external users:

  • Access to 10000 class cleanroom.
  • Training on and self-use of the following equipment: interferometer, profilometer, optical microscope, spin-coater, plasma cleaner and mask aligner,
  • Characterization:
    • Sample characterization using ToF-SIMS:
      • Surface microanalysis of organic and inorganic materials;
      • Complete mass spectra of surfaces;
      • PCA multivariate analysis for complex molecular spectra set of samples;
      • Chemical mapping of elements and molecular distribution;
      • Sample depth profile, implantation profiles and interface analysis;
      • 3D analysis (combines depth profiling with ion imaging).
  • SEM morphological and topographical characterization of a diverse range of samples.
  • Surface topographic analysis by using optical interferometry and mechanical profilometry.
  • Fabrication:
    • Design and development of micro- and nano-fabrication processes.
    • E-beam lithography technique, combined with other clean room fabrication techniques, for the manufacture of micro- and nano-structures.
    • Replication of micrometric and nanometric structures in thermoplastic polymers by HEL and NIL respectively.
    • Photolithography and Soft-lithography manufacture processes: Transparency and Cr masks, photoresists and SU-8, PDMS, RIE and wet-etching.
    • Thin layer deposition of metals (Au, Al, Ti, Cr, SiO2, etc.)
    • Cr Masks fabrication.

Head of Core Facilities:

Dr. Isabel Oliveira

Nanotechnology Platform Coordinator:

Dr. Mateu Pla

Nanotechnology Platform Technicians:

Judit Linacero

Marina Cazorla

Isabel Oliveira
Head of Core Facilities
+34 034 020 184
Access Procedures

Contact the platform personnel by sending an email to

Capacity External Users